APPLIED MATERIALS Centura-5200 Giga-Fill 3Chamber system
Wafer Size : 8 inch
Mainframe (Phase Ⅱ)
Ozone generator rack (Astex AX8200)
Control Rack
3 chamber (#A,#B,#C / RPS Top Mount)
MS Cool (#E), Orinter Chamber (#F)
Wide body Lord Lock, HP robot ,GPLIS Type
AMAT-0
Stock Condition : As-Is
※ Load lock Indexer / Process chamber Lift / HP Robot All homing & Moving test OK