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Centura-5200 Giga-Fill 3Chamber system
APPLIED MATERIALS
Condition
As-Is or refurbished
Configuration
MainFrame, Ac Rack, Ozone Rack, AMAT-0
Serial Number
Vintage
Wafer Size
8 inch [200MM}
Tool ID
BG190315
Stock
1
Warranty
As-Is
Delivery
In stock
Terms of Shipment
EXW

APPLIED MATERIALS Centura-5200 Giga-Fill 3Chamber system 


Wafer Size : 8 inch

Mainframe (Phase Ⅱ) 
Ozone generator rack (Astex AX8200)
Control Rack
3 chamber (#A,#B,#C / RPS Top Mount)
MS Cool (#E), Orinter Chamber (#F)
Wide body Lord Lock, HP robot ,GPLIS Type
AMAT-0 

Stock Condition : As-Is
 ※ Load lock Indexer / Process chamber Lift / HP Robot All homing & Moving test OK

Related search keywords

Centura-5200 Giga-Fill BPSG GPLIS RPS Top Mount

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